Month: January 2021

Leakage Variation with Aspect Ratio in ALD High-k ZrO2 Dielectrics

by Martin McBriarty, Intermolecular Inc., a business of Merck KGaA Darmstadt, Germany During last year’s virtual International Conference on Atomic Layer Deposition (ALD), Dr. Martin McBriarty delivered a presentation on ALD in high-aspect-ratio spaces (HAR). This blog summarizes the presentation, exploring how a material’s properties may change as the material goes into deep features like […]